Semiconductor Processing Measurements
Description: Mechanical, fluidic, electrical, chemical, thermal, optical, and general environmental measurement techniques and equipment in semiconductor manufacturing process. Includes basic metrology, typical units, and prefixes.
Length of time: 3 hours
Module: Microelectronic Devices
Module: Process Flow
1. Typical units of measurements and prefixes used in semiconductor manufacturing process assembly and test.
2. Precision and accuracy.
3. Measurement categories
Electrical (e.g. voltage, current, resistance, power)
Fluidic (e.g. pressure, vacuum, and flow)
Mechanical (e.g. depth, thickness, breaking strength)
Thermal (e.g. temperature)
Optical (e.g. intensity, resolution, opacity)
4. Measurement equipment
Student will be able to: