Semiconductor Manufacturing Process Safety


Description: Focus chiefly on chemical, electrical, mechanical, fire, thermal, and optical hazards, prevention, and regulations.

Length of time: 3 hours


Module: Atomic Theory


1. General awareness of factors that affect safety and the environment

2. Chemical safety

Ways chemicals can enter the body

Toxicity, flammability, and explosion

Chemical/air reactions and oxygen deficient air

Acids, alkalies and solvents

Poisons, oxidizers and process gases

Cryogens, carcinogens, mutagens, teratogens, andneurotoxins

Spill procedures

Labels, signals and signs

Cylinders and containers

Material safety data sheet

3. Electrical hazards

AC power

High power RF

Grounding considerations

4. Mechanical hazards

Material transport systems

Compressed gases (valves and cylinders)


5. Optical hazards


Student objectives:

Student will be able to:

  1. List hazardous chemicals used in the process of manufacturing semiconductors. Explain the hazards and how to prevent accidents.
  2. Discuss toxicity especially with respect to measurement of toxicity in an environment. List toxic gases in the semiconductor manufacturing process workplace.
  3. Compare and contrast injection, inhalation, ingestion, and absorption of harmful agents and how to guard against such entry into the body.
  4. List hazardous mechanical situations in the semiconductor manufacturing process workplace. Explain the hazards and how to prevent accidents.
  5. Discuss compressed gases and the affiliated chemical and mechanical hazards. Include safety information on the storage, handling, tagging, coding, disposal, separation, and use of compressed gases, cylinders, and valves.
  6. Explain what is meant by oxygen-deficient air and how the deficiency can occur in the semiconductor manufacturing process workplace.
  7. List some safety precautions when working with acids, alkalis, and solvents in semiconductor manufacturing process applications.
  8. Explain the meaning of cryogens, carcinogens, mutagens, teratogens, and neurotoxins.
  9. Compare and contrast flammability and explosion.
  10. Discuss electrical hazards of electrical power distribution systems and how to guard against accidents.
  11. Discuss the dangers of radio frequencies at high power levels.
  12. In plasma RF systems, discuss accident prevention.
  13. List some optical hazards in the semiconductor manufacturing process workplace. How can accidents be prevented.
  14. Explain the organization and interpret a material safety data sheet (MSDS).
  15. Demonstrate or describe a hazard signal system and chemical labeling for safety. List regulatory and other agencies that supply regulations, standards, and labeling systems pertinent to safety and hazards in semiconductor manufacturing process installations.