Semiconductor Manufacturing Process Safety
Description: Focus chiefly on chemical, electrical, mechanical, fire, thermal, and optical hazards, prevention, and regulations.
Length of time: 3 hours
Module: Atomic Theory
1. General awareness of factors that affect safety and the environment
2. Chemical safety
Ways chemicals can enter the body
Toxicity, flammability, and explosion
Chemical/air reactions and oxygen deficient air
Acids, alkalies and solvents
Poisons, oxidizers and process gases
Cryogens, carcinogens, mutagens, teratogens, andneurotoxins
Labels, signals and signs
Cylinders and containers
Material safety data sheet
3. Electrical hazards
High power RF
4. Mechanical hazards
Material transport systems
Compressed gases (valves and cylinders)
5. Optical hazards
Student will be able to:
- List hazardous chemicals used in the process of manufacturing semiconductors. Explain the hazards and how to prevent accidents.
- Discuss toxicity especially with respect to measurement of toxicity in an environment. List toxic gases in the semiconductor manufacturing process workplace.
- Compare and contrast injection, inhalation, ingestion, and absorption of harmful agents and how to guard against such entry into the body.
- List hazardous mechanical situations in the semiconductor manufacturing process workplace. Explain the hazards and how to prevent accidents.
- Discuss compressed gases and the affiliated chemical and mechanical hazards. Include safety information on the storage, handling, tagging, coding, disposal, separation, and use of compressed gases, cylinders, and valves.
- Explain what is meant by oxygen-deficient air and how the deficiency can occur in the semiconductor manufacturing process workplace.
- List some safety precautions when working with acids, alkalis, and solvents in semiconductor manufacturing process applications.
- Explain the meaning of cryogens, carcinogens, mutagens, teratogens, and neurotoxins.
- Compare and contrast flammability and explosion.
- Discuss electrical hazards of electrical power distribution systems and how to guard against accidents.
- Discuss the dangers of radio frequencies at high power levels.
- In plasma RF systems, discuss accident prevention.
- List some optical hazards in the semiconductor manufacturing process workplace. How can accidents be prevented.
- Explain the organization and interpret a material safety data sheet (MSDS).
- Demonstrate or describe a hazard signal system and chemical labeling for safety. List regulatory and other agencies that supply regulations, standards, and labeling systems pertinent to safety and hazards in semiconductor manufacturing process installations.