Table of Contents

 

Introduction

Modules:

Overview & History of Semiconductor Manufacturing Process
Atomic Theory
Crystal Structure
Crystal Growth and Wafer Preparation
Semiconductor Materials and Doping Techniques
Microelectronic Devices
Process Flow
Diffusion
Ion Implant
Oxidation
Photolithography
Etch
Wafer Cleaning
Chemical Vapor Deposition
Metallization and Thin Film
Probe, Assembly & Test
Contamination Control
Semiconductor Manufacturing Process Safety
Semiconductor Processing Measurements

Reference List