Experiment 11

Residual Gas Analyzer

Unknown Gas Mixture


Objective: Experimentally determine the composition of an introduced unknown gas.

Reference: Module 12

Required Materials:

Varian Vacuum Trainer

Latex gloves

Residual Gas Analyzer

Unknown Gas Sample


Experimental Procedure:

Students must wear latex gloves when handling vacuum components.

1. The vacuum system should be operating at base pressure.

2. Introduce the unknown gas via the variable leak valve.

3. Turn on the residual gas analyzer. Refer to the operating manual for the RGA.

4. Conduct a scan of the masses.

5. Record the masses and the amplitude value for each mass.

6. Analyze the spectra and determine the composition of the unknown gas.