Experiment 5

Heated Chamber Pumpdown


Objective: Experimentally obtain the high vacuum pumpdown curve from a heated chamber to compare system performance with that of an ambient temperature.

Reference: Modules 1, 5, 6

Required Materials:

Varian Vacuum Trainer


Latex gloves

Two heat lamps


Experimental Procedure:

Students must wear latex gloves when handling vacuum components.

This experiment requires data from Experiment 3 for comparison purposes.

1. With the system at equilibrium at atmospheric pressure, place the heat lamps to heat the bell jar for 30 minutes.

2. Visually inspect the base plate and gasket for cleanliness. If the gasket needs cleaning, wipe with alcohol. Dry thoroughly with a lint-free cloth and lubricate with a thin film of vacuum grease.

3. Place the bell jar and shield on the baseplate.

4. Close all valves.

5. Plug the training into the power outlet.

6. Turn both Mechanical and Turbo Pump toggle switches to the ON position.

7. Select the roughing gauge on the controller (TC1, Channel 1).

8. Check the gauge. It should be reading atmospheric pressure (7.6 on the +2 scale). Note: The TC gauge is not accurate above 1 Torr.

9. Open the foreline valve.

10. Press START on the Turbo Controller Panel. Allow the Turbo Controller to come up to speed ( 75 K rpm) and indicate NORMAL OPERATION.

11. Close the foreline valve.

12. Open the roughing valve in one continuous motion. Start the stopwatch as you begin opening the valve. Note: The foreline and roughing valve should never be opened at the same time.

13. Record the pressure at 30 second intervals for 5 minutes, the 1 minute intervals for the next 5 minutes until reading 3 Torr.

14. At 3 Torr, begin crossover operation by

- closing the roughing valve

- opening the foreline valve and waiting 10 seconds

- opening the high vacuum valve

15. Switch the gauge to BA (ION gauge). The gauge will begin operation when in range (<1 mtorr).

16. Continue taking readings until reaching base pressure. Record the pressure at 30 second intervals for 5 minutes, at 1 minute intervals for the next 5 minutes, and 2 minute intervals until completion. (Minimum length of the experiment is 20 minutes.)

17. Plot pressure versus time on seven-cycle x 70 division semilog graph paper.

18. Compare the results of this experiment with those of Experiment 3 and comment on the differences.