Module 12: Residual Gas Analyzers

Description: Provides fundamental information about gases necessary to understand vacuum device operation.

Length of Time: 4 hours


1. RGA versus mass spectrometer

2. Quadrapole

3. Magnetic sector

4. Spectrum interpretation


Student Objectives:

Student will be able to:

1. State the purpose of a residual gas analyzer.

2. Identify the major components of RGA’s.

3. Describe a common source analyzer and detector utilized in RGA’s.

4. Describe the differences in mass filtering between a quadrapole and a magnetic sector RGA.

5. Analyze a mass spectrum in a typical vacuum situation.

6. Given a mass spectrum, determine if the system environment is a clean environment or a contaminated environment.

7. Use a RGA to differentiate between a leak and outgassing.



Chambers: Chapter 4 "Measurement of Pressure"

O’Hanlon: Chapter 8 "Residual Gas Analyzers"

Chapter 9 "Interpretation of RGA Data"

Varian: Chapter 5 "Gauges"