Module 5: Gas Flow
Description: Describes the movement of gas molecules under different pressure conditions.
Length of Time: 3 hours
1. Turbulent flow
2. Viscous (laminar) flow
3. Intermediate flow
4. Molecular flow
5. Speed, throughput, and conductance
Student will be able to:
1. Define the following types of flows: turbulent, viscuous, intermediate, and molecular.
2. Relate the different gas flows to the pressure regions: low, high, and ultra high.
3. Identify component geometry for the different pressure flow regimes.
4. Define the terms: throughput and conductance.
5. Given a component data sheet or catalog, find the conductance value for a given vacuum system component.
6. Use the term "throughput" to describe vacuum systems, pump operation, and gas load.
Chambers: Chapter 2 "Gases in Vacuum Systems"
OHanlon: Chapter 3 "Gas Fow"
Varian: Chapter 1 "Vacuum Fundamentals"