Table of Contents

 

Introduction

Course Content

Module 1: Introduction to Vacuum

Module 2: Kinetic Theory of Gases

Module 3: Units of Pressure and Definitions

Module 4: Phase/States of Matter

Module 5: Gas Flow

Module 6: Gas Sources

Module 7: Heat Transfer

Module 8: Low Vacuum Gauges

Module 9: Mechanical Pumps

Module 10: High & Ultra High Vacuum

Module 11: High & Ultra High Vacuum Gauges

Module 12: Residual Gas Analyzers

Module 13: Leak Detection

Module 14: Vacuum Components & Materials

Module 15: Vacuum Lab Procedures

 

Laboratory Equipment

 

Laboratory Experiments

Experiment 1: Rough Pumpdown from Atmospheric Pressure: Air Fill

Experiment 2: Rough Pumpdown from Atmospheric Pressure: Nitrogen Environment

Experiment 3: High Vacuum Pumpdown from Atmospheric Pressure: Air Environment

Experiment 4: High Vacuum Pumpdown from Atmospheric Pressure: Nitrogen Environment

Experiment 5: Heated Chamber Pumpdown

Experiment 6: Liquid Nitrogen-Assist, High Vacuum Pumpdown

Experiment 7: Rate-of-Rise Experiment

Experiment 8: Surface Area Experiment/Outgassing

Experiment 9: Conductance

Experiment 10: Residual Gas Analyzer: Air Pumpdown

Experiment 11: Residual Gas Analyzer: Unknown Gas Mixture