Resources for Equipment and Laboratory Supplies

Objective

This checklist identifies minimum facilities, equipment and supplies that are necessary and sufficient to provide authentic learning experiences for the mastery of work-related competencies in semiconductor manufacturing technology and related support industries. This list is not intended to be exhaustive or exclusive. Individual programs will augment this list with specific equipment and supplies to support the unique requirements of the program and industry partners.

 

Audience

College administrators, faculty and others involved in the design and development of instructional laboratories for semiconductor and other advanced technology manufacturing programs at two-year degree granting institutions.

 

Purpose

  1. To serve as a guide for planning and equipping facilities for semiconductor manufacturing technology programs.
  2. To identify critical laboratory resources needed to support performance based assessment of learned competencies in a semiconductor manufacturing technology curriculum.

 

For further information on this checklist, contact MATEC@matec.org

 

 

CHEMISTRY LABORATORY & EQUIPMENT CHECKLIST

 

Fume Hood

www.vwrsp.com

Cost: $4,000-6,000

 

Wet Bench with Chemical/Acid Storage’s

Fisher Scientific 1-800-766-7000

www.fishersci.com

Cost: $4,000-6,000

 

Chemical Disposal

Fisher Scientific 1-800-766-7000

www.fishersci.com

Cost: $3,000 & above

 

Deionized H2O System

Fisher Scientific 1-800-766-7000

www.fishersci.com

Cost: $2,000-4,000 depending on volume & quantity

 

Showers & Eye Bath

Fisher Scientific1-800-766-7000

www.fishersci.com

Cost: $500-1,000

 

Oscilloscope

www.fluke.com

www.tmo.hp.com

www.tek.com

847-821-1900

Cost: $1,500-2,000

  

DC Power Supply (Triple Output)

www.fluke.com

www.tmo.hp.com

www.tek.com

847-821-1900

Cost: $400-500

 

Multimeter

www.fluke.com

www.tmo.hp.com

www.tek.com

847-821-1900

Cost: $100-150

 

Function Generator

www.fluke.com

www.tmo.hp.com

www.tek.com

847-821-1900

Cost: $200-250

 

Soldering Stations

(information not available at this time)

 

Vacuum Trainer

www.varian.com

www.mksinst.com

Cost: $18,000-20,000 and $8,000-10,000

 

RF Generator & Matching Network

www.rfservices.com

Cost: $6,000-7,000

 

AC, DC, Stepper Motors and/or Trainers Lab

www.tii-tech.com

847-821-1900

Cost: $4,000 and above

 

Industrial Sensors, Lab Components or Trainers

TII – Technical Education Systems 1-800-451-2169

www.tii-tech.com

Cost: $3,000

 

Pneumatics, Lab Components or Trainers

www.smcusa.com

www.tii-tech.com

847-821-1900

Cost: $10,000 and above

 

Hydraulics, Lab Components or Trainers

www.hampton.com

www.parker.com

847-821-1900

Cost: $10,000 and above

 

Programmable Logic Controllers

www.ab.com

www.tii-tech.com

847-821-1900

Cost: $4,000 and above

 

Single Wafer Spin Processor (Spin on photoresist)

Laurell Technologies Corp 215-699-7278

www.laurell.com

Cost: $12,000

 

Oven (Chem Lab Approved) (Suitable for photoresist hard bake)

www.fishersci.com

www.vrwsp.com

Cost: $1,100-1,200

 

Microscope (suitable for wafer inspection)

VWR 1-800-932-5000

www.vrwsp.com

Cost: $3,000-4,000

 

Furnace, 6 inch tube type (Suitable for oxidation & diffusion, temps =1100-1200C)

VWR 1-800-932-5000

www.vrwsp.com

Cost: $4,000-6,500

 

Hot Plate

(Suitable for soft photoresist bake)

VWR 1-800-932-5000

www.vrwsp.com

Cost: $200-700

 

Ultra-Violet Light Exposure System (can be custom built, contact MATEC for construction plans)

Source of UV Light Bulbs – Fisher Scientific 1-800-766-7000

www.fishersci.com

Cost: less than $200

 

Pressurized N2 Gas Cylinders (Dry wafers during process steps)

Contact local gas distributor

Cost: Variable depending on volume & quantity used

 

Quartzware (Suitable for furnace use)

Quartz International 505-797-7500

www.quartz.com

 

4 or 6 inch wafers

Possible source……Industry donations?

Cost: Variable

 

Wafer Boats/Carriers

Fluoroware 612-448-3131

www.fluoroware.com

Cost: Variable

 

 

REUSEABLE & DISPOSABLE PROTECTIVE WEAR & GARMENTS

 

Bunny Suits, Hoods, Booties, Hair Nets, Masks, Vinyl Gloves, Latex Gloves, Solvent Acid Gloves

Fisher Safety "Products for Controlled Environments" Catalog

1-800-772-6733 www.fishersci.com

Cost: Variable

 

CHEMICALS

 

Photoresist – positive resist

Propylene Glycol Monomethyl, Ether Acetate, PMA, PGMEA

www.jtbaker.com or www.mallchem.com

Cost: $500/gal

 

Resist Strip

Tetramthylammonium Hydroxide, Propanediaol, Methyl

www.jtbaker.com

www.fishersci.com

Cost: $72/gal

 

Developer

Tetramthylammonium Hydroxide + Water

www.jtbaker.com

www.fishersci.com

Cost: $30/gal

 

Acetone, used as EBR and cleaner

www.jtbaker.com

www.fishersci.com

Cost: $18/gal

*For Material Safety Data Sheets, request from vendor.

 

 

SELECTED VENDORS, SUPPLIERS AND CONTACTS

 

1. Brady
        Signmark Division

2221 West Camden Road
P.O. Box 2999
Milwaukee, WI 53201-2999
Toll-Free: (800) 635-7557
In Milwaukee: (414) 228-1411
Fax: (800) 445-7446
www.bradysignmark.com

2. Consolidated Plastics Company, Inc.

8181 Darrow Road
Twinsburg, OH 44087
General: (800) 362-1000
(216) 425-3900
Fax: (216) 425-3333

Consolidated Plastics products contains storage bins, clothing, bags, gloves, and other items that are produced with plastics.

3. Craftsman

Sears Power & Hand Tools
20 Presidential Drive
Roselle, IL 60172
General: (800) 377-7414
Fax: (800) 390-8792
www.sears.com/craftsman

Craftsman carries a selection of hand and power tools.

4. Fluoroware

102 Jonathan Boulevard North
Chaska, MN 55318
General: (612) 368-8694
Fax: (612) 368-8022
www.fluoroware.com

Fluoroware is a great source for wafer boats used in the assembly line process. They supply us with acid boats, tweezers, cassette holders and cassette boxes.

5. Grinnell Corporation

Power-strut
16100 South Lathrop Avenue
Harvey, IL 60426
Phone: (708) 339-1610

Power-strut contains a full line of support beams and brackets to build your cleanroom or laboratory.

6. HPS Division

MKS Instruments, Inc.
5330 Sterling Drive
Boulder, CO 80301
General: (800) 345-1967
(303) 449-9861
Fax: (303) 442-6880
www.mksinst.com

HPS has a full line of vacuum instruments and attachment components.

7. Kurt J. Lesker Company

1515 Worthington Avenue
Clairton, PA 15025
Phone: (412) 233-4200
(800) 245-1656
Fax: (412) 233-4375
www.lesker.com

8. National Bag Company, Inc.

2233 Mill Road
Hudson, OH 44236
Phone: (216) 425-2600
(800) 247-6000

National Bag contains bags, boxes, lab gowns, and wrapping supplies.

9. Parker Hannifin Corporation

Instrumentation Connectors Division
P.O. Box 400004-1504
Huntsville, AL 35815-1504
General: (205) 881-2040
Fax: (205) 881-5730
www.parker.com

Parker Hannifin specializes in instrument pipe fittings.

10. Ryan Herco Products Corporation

Corporate Headquarters
P.O. Box 588
2509 North Naomi Street
Burbank, CA 91503
Phone: (800) 848-1141
www.ryanherco.com

Ryan Herco contains a full line of pumps, valves, pipes, and storage containers for movement and handling chemicals.

11. Seton Name Plate Company

Department AE-5A
20 Thompson Road
P.O. Box 819
Branford, CT 06405-0819
General: (800) 243-6624
Fax: (800) 345-7819
www.seton.com