Lab 1: Achieving Vacuum with the MKS Trainer.
This lab includes system overview, the mechanical pump, system control software familiarization, bringing the sytem to its base pressure, zeroing the capacitance manometer, performing a pressure rate-of-rise leak test, venting procedure.
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Lab 2: System Time Constant
The purpose of this lab is to explain and demonstrate the system time constant and how it varies with different conductances.
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Lab 3: Understanding Throughput and its Relationship to Speed and Pressure
The purpose of this lab is to be capable of converting between the common units of throughput (torr-liters/sec and std. cc/min [sccm]); understand the relationship between pumping speed (S) in liters/sec, pressure (P) in torr, and throughput (Q) in torr-liters/sec; calculate and verify pumping speed at a particular point in the system and interpret the pressure rate-of-rise for a vacuum system.
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Lab 4: Manual Pressure Control - Downstream
The purpose of this lab is to: demonstrate how a set point pressure can be acquired and maintained manually with downstream control and compare control performance using elements with differing conductance ranges.
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Lab 5: Downstream Auto Pressure Control with the Smart Throttle Valve
The purpose of this lab is to understand the downstream mode of pressure control, be able to explain what PID control is and how it is applied in pressure control, compare auto pressure control to manual pressure control and understand the effects of varying the tuning (PID) parameters.
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Lab 6: Upstream Control with a
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Lab 8: Mass Flow Controller Flow Verification Using the Pressure Rate-of-Rise Technique
The purpose of this lab is to understand how to verify the mass flow from an MFC by using the pressure rate-of-rise technique and determine the gas correction factor for a gas other than nitrogen/air.
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Lab 9: Mass Flow Controller Troubleshooting
with a Breakout Connector
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