The @MATEC Archives

Volume 1, Number 2 Suggested Textbooks and other Resources
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Titles for courses in Semiconductor Process Technology

Microchip Fabrication, Third Edition, by Pete Van Zant, McGraw-Hill, 1997
Phone: 1-800-262-4729
ISBN 0-07-067250-41
"Good introductory level text. Requires some understanding of chemistry."


The Science of Engineering of Microelectronic Fabrication, by Stephen A. Campbell,
Oxford Press, 1996. Phone: 1-800-451-7556
ISBN 0-19-510508-7
"Intermediate level text. Suitable for a capstone course in semiconductor processing."


Silicon Processing for the VLSI Era, Volume 1 – Process Technology, by S. Wolf and R. N. Tauber, Lattice Press, 1986. Phone: 714-840-5010
ISBN 0-9616721-3-7
"Written over twelve years ago, but still a solid reference for instructors teaching semiconductor processing courses."


ULSI Technology, by C.Y. Chang and S.M. Sze, McGraw-Hill, 1996
Phone: 1-800-262-4729
ISBN 0-07-063062-3
"A new text on semiconductor processing. Suitable for a capstone course on silicon processing in an associate degree program.